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Development of Mass Microsensors for Implantable MEMS

Zalazar:Development of Mass Microsensor
Autor: Martín Zalazar
Verfügbarkeit: Auf Lager.
Artikelnummer: 1138051
ISBN / EAN: 9783639708363

Verfügbarkeit: sofort lieferbar

Inkl. MwSt. , zzgl. Versandkosten


Glaucoma is a disease that affects tens of millions of people around the world. The development of MEMS and the generation of new materials allow the development of implantable micro-devices with improved biocompatibility. The knowledge of biomolecules associated with the glaucoma pathology will increase the effectiveness of a microvalve for glaucoma tretmentt. In this sense, a mass microsensor capable of sensing biomolecules is desirable. This book was focused on the design, simulation, fabrication and characterization of MEMS-based mass microsensors for the detection of biomolecules. Regarding the biocompatibility, UNCD and Parylene were used as structural materials; as piezoelectric materials, quartz, PVDF and AlN were used. The parameters of the resonators were extracted by using 3D FEM models and experimental results. UNCD films used as substrate, yielded a highly oriented (002) AlN films even as thin as 80 nm; it exhibited a piezoelectric coefficient of about 5.3 pm/V, one of the highest demonstrated today. AlN/diamond structure is a very promising device for FBAR applications so it opens a huge field of biomedical applications.


Autor Verlag Scholar's Press
ISBN / EAN 9783639708363 Bindung Taschenbuch

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